Specification
DUT displacement range：100mm, 0.005%
Function ：Calibration and Performance testing, automatic
Power supply accuracy：+/- 1mv
Linear motion accuracy：+/- 1um
Test System：PXI Platform, RAID, IPC software
Cycle time：150s/2pcs
Performance characteristics:
1. High accuracy: 1um repetition accuracy +10um positioning accuracy.
2. Flexible formula: set calibration + test multiple functions, collocation test item selection.
3. Powerful software: clear and easy to operate into the machine software, test data automatically saved, 100% traceable.
