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Machine Division: No.5 Yuqian Road., New District, Suzhou, P.R.C
Coating Division: 420 Belling Road, Lingfeng Village, Beiqiao Street, Xiangcheng District, Suzhou, P.R.C
Tel:+86-512-66796911
Business Hotline:+86-512-66796916 66796915 66791662 18913506686
Technical Hotline:+86-512-66791602
Website:http://www.delix.cn
E-mail: delix@163.com

Wafer etching machine

  • category:Wafer etching machine
  • Number of views:56 order
  • Release Date:2024/10/25 9:37:16
  • Overview
Principle


Applications
1、Chemical etching for 4 ",5”,6 “,8” wafer surface with Si02 film
2、Chemical etching for quartz, optical, solar energy silicon element
3、MEMS wet etching

Technical Data
Specification Rang of wafer Etch chord Repeatability Rates Power
DWE-08 4",5”,6 8” No ±0.05mm 120pcs/h 0.5w
DWE-08A 4 5”,6“,8” Yes ±0.05mm 100pcs/h 1.2kw

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